X-ray fluorescence of layered synthetic materials with interfacial roughness

Measurements of x-ray fluorescence versus grazing incidence angle at fixed incoming photon energy can provide useful information on surface and interfacial microstructure. A matrix formulation suitable for analysis of radiant energy flow inside a layered material, and hence angular fluorescence emission, is presented, and a vector scattering model is employed to account for the effect of interfacial roughness. Good agreement between experimental results of x-ray fluorescence yield and the model calculations has been obtained in a semiconductor heterostructure and a superlattice system.