Transfer printed nanomembrane high-Q filters based on displaced double-layer fano resonance photonic crystal slabs

Fano resonance, known from atomic physics, has been employed for a wide variety of nanophotonic structures, such as quantum dots, photonic crystals (PCs), plasmonics, and metamaterials, and so on. [1] With modal dispersion engineering, Fano filters and reflectors can all be realized in single layer dielectric PC structures [2-4]. Suh et al. and Liu et al. reported earlier the optical Q-factors and the optomechanical interactions can be controlled by precisely tuning the lattice displacement between two coupled PC slabs (PCS) [5, 6]. We reported earlier Fano filters (or frequency selective surfaces) with measured Q-factor of 5,000, based on single or double layer PCS, with perfectly aligned lattices between two PC layers [7]. We report here the first experimental demonstration of double-layer PCS with precisely controlled displacement, based on Polydimethylsiloxane (PDMS) nanomembrane (NM) transfer printing process [8, 9].