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The use of regularized least squares minimization for the deconvolution of sem images

  • Eric Lifshin
  • , Siwei Lyu
  • , Yudhishthir R. Kandel
  • , Richard Moore
  • SUNY Albany
  • RLM2 Analytical

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)386-387
Number of pages2
JournalMicroscopy and Microanalysis
Volume20
Issue number3
DOIs
StatePublished - Aug 1 2014
EventMicroscopy and Microanalysis 2014, M and M 2014 - Hartford, United States
Duration: Aug 3 2014Aug 7 2014

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