Synthesis of low resistivity complex oxides on MgO using Pt as buffer layer

P. Tiwari; X. D. Wu; S. R. Foltyn; I. H. Campbell; Q. X. Jia; R. E. Muenchausen; D. E. Peterson; T. E. Mitchell

doi:10.1007/BF02666173

Synthesis of low resistivity complex oxides on MgO using Pt as buffer layer

P. Tiwari
, X. D. Wu
, S. R. Foltyn
, I. H. Campbell
, Q. X. Jia
, R. E. Muenchausen
, D. E. Peterson
, T. E. Mitchell

Department of Materials Design and Innovation

Los Alamos National Laboratory
Global Foundries, Inc.

Research output: Contribution to journal › Article › peer-review

Abstract

Highly crystalline SrRuO₃ (SRO) and La_0.5Sr_0.5CoO₃ (LSCO) thin films were deposited on (100) Pt/ MgO by pulsed laser deposition. The films were mainly (001) textured normal to the substrate surface with a high degree of in-plane orientation with respect to the substrate's major axes. These films were characterized using x-ray diffraction, Rutherford backscattering, four-point probe resistivity measurement, and transmission electron microscopy. The room temperature resistivity for LSCO and SRO films on Pt/MgO was found to be ∼35 and ∼40 μΩ-cm, respectively. An ion beam minimum channeling yield of ∼43% and ∼33% was obtained for LSCO and SRO films, respectively. The interface between Pt and oxide was found to be smooth and free from any interfacial diffusion. This result showed that high-quality low resistivity oxide thin films can be deposited on Pt.

Original language	English
Pages (from-to)	51-55
Number of pages	5
Journal	Journal of Electronic Materials
Volume	25
Issue number	1
DOIs	https://doi.org/10.1007/BF02666173
State	Published - Jan 1996

Keywords

Low resistivity oxide
Pt/MgO
Pulsed laser deposition (PLD)
Thin films

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@article{20d45f79ace04077906a6a1f9c192115,

title = "Synthesis of low resistivity complex oxides on MgO using Pt as buffer layer",

abstract = "Highly crystalline SrRuO3 (SRO) and La0.5Sr0.5CoO3 (LSCO) thin films were deposited on (100) Pt/ MgO by pulsed laser deposition. The films were mainly (001) textured normal to the substrate surface with a high degree of in-plane orientation with respect to the substrate's major axes. These films were characterized using x-ray diffraction, Rutherford backscattering, four-point probe resistivity measurement, and transmission electron microscopy. The room temperature resistivity for LSCO and SRO films on Pt/MgO was found to be ∼35 and ∼40 μΩ-cm, respectively. An ion beam minimum channeling yield of ∼43\% and ∼33\% was obtained for LSCO and SRO films, respectively. The interface between Pt and oxide was found to be smooth and free from any interfacial diffusion. This result showed that high-quality low resistivity oxide thin films can be deposited on Pt.",

keywords = "Low resistivity oxide, Pt/MgO, Pulsed laser deposition (PLD), Thin films",

author = "P. Tiwari and Wu, \{X. D.\} and Foltyn, \{S. R.\} and Campbell, \{I. H.\} and Jia, \{Q. X.\} and Muenchausen, \{R. E.\} and Peterson, \{D. E.\} and Mitchell, \{T. E.\}",

year = "1996",

month = jan,

doi = "10.1007/BF02666173",

language = "English",

volume = "25",

pages = "51--55",

journal = "Journal of Electronic Materials",

issn = "0361-5235",

publisher = "Springer New York",

number = "1",

}

TY - JOUR

T1 - Synthesis of low resistivity complex oxides on MgO using Pt as buffer layer

AU - Tiwari, P.

AU - Wu, X. D.

AU - Foltyn, S. R.

AU - Campbell, I. H.

AU - Jia, Q. X.

AU - Muenchausen, R. E.

AU - Peterson, D. E.

AU - Mitchell, T. E.

PY - 1996/1

Y1 - 1996/1

N2 - Highly crystalline SrRuO3 (SRO) and La0.5Sr0.5CoO3 (LSCO) thin films were deposited on (100) Pt/ MgO by pulsed laser deposition. The films were mainly (001) textured normal to the substrate surface with a high degree of in-plane orientation with respect to the substrate's major axes. These films were characterized using x-ray diffraction, Rutherford backscattering, four-point probe resistivity measurement, and transmission electron microscopy. The room temperature resistivity for LSCO and SRO films on Pt/MgO was found to be ∼35 and ∼40 μΩ-cm, respectively. An ion beam minimum channeling yield of ∼43% and ∼33% was obtained for LSCO and SRO films, respectively. The interface between Pt and oxide was found to be smooth and free from any interfacial diffusion. This result showed that high-quality low resistivity oxide thin films can be deposited on Pt.

AB - Highly crystalline SrRuO3 (SRO) and La0.5Sr0.5CoO3 (LSCO) thin films were deposited on (100) Pt/ MgO by pulsed laser deposition. The films were mainly (001) textured normal to the substrate surface with a high degree of in-plane orientation with respect to the substrate's major axes. These films were characterized using x-ray diffraction, Rutherford backscattering, four-point probe resistivity measurement, and transmission electron microscopy. The room temperature resistivity for LSCO and SRO films on Pt/MgO was found to be ∼35 and ∼40 μΩ-cm, respectively. An ion beam minimum channeling yield of ∼43% and ∼33% was obtained for LSCO and SRO films, respectively. The interface between Pt and oxide was found to be smooth and free from any interfacial diffusion. This result showed that high-quality low resistivity oxide thin films can be deposited on Pt.

KW - Low resistivity oxide

KW - Pt/MgO

KW - Pulsed laser deposition (PLD)

KW - Thin films

UR - https://www.scopus.com/pages/publications/0029679050

U2 - 10.1007/BF02666173

DO - 10.1007/BF02666173

M3 - Article

AN - SCOPUS:0029679050

SN - 0361-5235

VL - 25

SP - 51

EP - 55

JO - Journal of Electronic Materials

JF - Journal of Electronic Materials

IS - 1

ER -

Synthesis of low resistivity complex oxides on MgO using Pt as buffer layer

Abstract

Keywords

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