Abstract
Auger electron spectroscopy and ion sputtering techniques were used to determine the free surface composition and MIS solar cell fabricated on polycrystalline silicon. A layer of approximately 20 A of mixture of silicon oxide and chemisorpted oxygen atoms were found on the Si surface. For the Cr-Cu-Cr-SiO//2-Si solar cell, the copper layer is the key factor for reducing the series resistance of the metal layers. The pure oxide layer was found to be almost nonexistent and a mixture of silicon oxygen and chromium was detected between the silicon and metal interface. Compositions of the cell were investigated as a function of temperature. The results were used to estimate the lifetime of the cell. It was found that the cell should have a very long lifetime if operated under 200 degree C.
| Original language | English |
|---|---|
| Pages (from-to) | 696-699 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1981 |
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