Structure, processing, and property relationships in tunable rf and microwave devices

Brady J. Gibbons; Bae Ho Park; Yongyu Gim; Yan Fan; Alp T. Findikoglu; David W. Reagor; Quanxi Jia

doi:10.1080/10584580108011949

Structure, processing, and property relationships in tunable rf and microwave devices

Brady J. Gibbons
, Bae Ho Park
, Yongyu Gim
, Yan Fan
, Alp T. Findikoglu
, David W. Reagor
, Quanxi Jia

Department of Materials Design and Innovation

Los Alamos National Laboratory

Research output: Contribution to journal › Conference article › peer-review

Abstract

Our work on tunable rf and microwave devices based on 90 off-axis magnetron sputtered Ba0.6Sr0.4TiO3 epitaxial thin films is reviewed. In particular, we have studied the effects of energetic bombardment during deposition on the structural and electrical properties of these films. The fundamental result of changing the energetic bombardment conditions during deposition is to affect the stress/strain state of the films. We show that high bombardment conditions result in films with significantly extended out-of-plane lattice constants and depressed dielectric constants and tunabilities.

Original language	English
Pages (from-to)	261-270
Number of pages	10
Journal	Integrated Ferroelectrics
Volume	39
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580108011949
State	Published - 2001
Event	13th International Symposium on Integrated Ferroelectrics - Colorado Springs, CO, United States Duration: Mar 11 2006 → Mar 14 2006

Keywords

BST
Energetic bombardment
Tunable

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10.1080/10584580108011949

Cite this

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title = "Structure, processing, and property relationships in tunable rf and microwave devices",

abstract = "Our work on tunable rf and microwave devices based on 90 off-axis magnetron sputtered Ba0.6Sr0.4TiO3 epitaxial thin films is reviewed. In particular, we have studied the effects of energetic bombardment during deposition on the structural and electrical properties of these films. The fundamental result of changing the energetic bombardment conditions during deposition is to affect the stress/strain state of the films. We show that high bombardment conditions result in films with significantly extended out-of-plane lattice constants and depressed dielectric constants and tunabilities.",

keywords = "BST, Energetic bombardment, Tunable",

author = "Gibbons, \{Brady J.\} and Park, \{Bae Ho\} and Yongyu Gim and Yan Fan and Findikoglu, \{Alp T.\} and Reagor, \{David W.\} and Quanxi Jia",

year = "2001",

doi = "10.1080/10584580108011949",

language = "English",

volume = "39",

pages = "261--270",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

note = "13th International Symposium on Integrated Ferroelectrics ; Conference date: 11-03-2006 Through 14-03-2006",

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TY - JOUR

T1 - Structure, processing, and property relationships in tunable rf and microwave devices

AU - Gibbons, Brady J.

AU - Park, Bae Ho

AU - Gim, Yongyu

AU - Fan, Yan

AU - Findikoglu, Alp T.

AU - Reagor, David W.

AU - Jia, Quanxi

PY - 2001

Y1 - 2001

N2 - Our work on tunable rf and microwave devices based on 90 off-axis magnetron sputtered Ba0.6Sr0.4TiO3 epitaxial thin films is reviewed. In particular, we have studied the effects of energetic bombardment during deposition on the structural and electrical properties of these films. The fundamental result of changing the energetic bombardment conditions during deposition is to affect the stress/strain state of the films. We show that high bombardment conditions result in films with significantly extended out-of-plane lattice constants and depressed dielectric constants and tunabilities.

AB - Our work on tunable rf and microwave devices based on 90 off-axis magnetron sputtered Ba0.6Sr0.4TiO3 epitaxial thin films is reviewed. In particular, we have studied the effects of energetic bombardment during deposition on the structural and electrical properties of these films. The fundamental result of changing the energetic bombardment conditions during deposition is to affect the stress/strain state of the films. We show that high bombardment conditions result in films with significantly extended out-of-plane lattice constants and depressed dielectric constants and tunabilities.

KW - BST

KW - Energetic bombardment

KW - Tunable

UR - https://www.scopus.com/pages/publications/34547786521

U2 - 10.1080/10584580108011949

DO - 10.1080/10584580108011949

M3 - Conference article

AN - SCOPUS:34547786521

SN - 1058-4587

VL - 39

SP - 261

EP - 270

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

T2 - 13th International Symposium on Integrated Ferroelectrics

Y2 - 11 March 2006 through 14 March 2006

ER -

Structure, processing, and property relationships in tunable rf and microwave devices

Abstract

Keywords

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