STM and X-ray diffraction temperature-dependent growth study of SrRuO3 PLD thin films

M. E. Hawley; Q. X. Jia; G. W. Brown

STM and X-ray diffraction temperature-dependent growth study of SrRuO₃ PLD thin films

M. E. Hawley
, Q. X. Jia
, G. W. Brown

Department of Materials Design and Innovation

Los Alamos National Laboratory

Research output: Contribution to journal › Conference article › peer-review

Abstract

The thermal effect on crystalline quality, epitaxial substrate and electrical properties of SrRuO₃ (SRO) films was studied. The SRO films were deposited on LaAlO₃ single crystal substrates by pulsed laser deposition and were characterized by X-ray diffraction, 4-point transport and scanning tunneling microscopy (STM). The films' microstructures evolved from polygranular to layered plate-like structure at higher deposition temperature, T_s>650 °C. Increasing T_s showed increasing grain size and a stronger orientational relationship between film and substrate. An increased conductivity was also observed during changes in the microstructure.

Original language	English
Pages (from-to)	57-62
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	441
State	Published - 1997
Event	Proceedings of the 1996 MRS Fall Meeting - Boston, MA, USA Duration: Dec 2 1996 → Dec 6 1996

Cite this

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title = "STM and X-ray diffraction temperature-dependent growth study of SrRuO3 PLD thin films",

abstract = "The thermal effect on crystalline quality, epitaxial substrate and electrical properties of SrRuO3 (SRO) films was studied. The SRO films were deposited on LaAlO3 single crystal substrates by pulsed laser deposition and were characterized by X-ray diffraction, 4-point transport and scanning tunneling microscopy (STM). The films' microstructures evolved from polygranular to layered plate-like structure at higher deposition temperature, Ts>650 °C. Increasing Ts showed increasing grain size and a stronger orientational relationship between film and substrate. An increased conductivity was also observed during changes in the microstructure.",

author = "Hawley, \{M. E.\} and Jia, \{Q. X.\} and Brown, \{G. W.\}",

year = "1997",

language = "English",

volume = "441",

pages = "57--62",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1996 MRS Fall Meeting ; Conference date: 02-12-1996 Through 06-12-1996",

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TY - JOUR

T1 - STM and X-ray diffraction temperature-dependent growth study of SrRuO3 PLD thin films

AU - Hawley, M. E.

AU - Jia, Q. X.

AU - Brown, G. W.

PY - 1997

Y1 - 1997

N2 - The thermal effect on crystalline quality, epitaxial substrate and electrical properties of SrRuO3 (SRO) films was studied. The SRO films were deposited on LaAlO3 single crystal substrates by pulsed laser deposition and were characterized by X-ray diffraction, 4-point transport and scanning tunneling microscopy (STM). The films' microstructures evolved from polygranular to layered plate-like structure at higher deposition temperature, Ts>650 °C. Increasing Ts showed increasing grain size and a stronger orientational relationship between film and substrate. An increased conductivity was also observed during changes in the microstructure.

AB - The thermal effect on crystalline quality, epitaxial substrate and electrical properties of SrRuO3 (SRO) films was studied. The SRO films were deposited on LaAlO3 single crystal substrates by pulsed laser deposition and were characterized by X-ray diffraction, 4-point transport and scanning tunneling microscopy (STM). The films' microstructures evolved from polygranular to layered plate-like structure at higher deposition temperature, Ts>650 °C. Increasing Ts showed increasing grain size and a stronger orientational relationship between film and substrate. An increased conductivity was also observed during changes in the microstructure.

UR - https://www.scopus.com/pages/publications/0030691505

M3 - Conference article

AN - SCOPUS:0030691505

SN - 0272-9172

VL - 441

SP - 57

EP - 62

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Fall Meeting

Y2 - 2 December 1996 through 6 December 1996

ER -

STM and X-ray diffraction temperature-dependent growth study of SrRuO₃ PLD thin films

Abstract

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