TY - GEN
T1 - Statistical phase shifting step estimation based on continuous wavelet transform for high resolution interferometry metrology
AU - Chen, Bicheng
AU - Basaran, Cemal
PY - 2010
Y1 - 2010
N2 - A statistical phase shifting estimation for temporal phase shifting interferometry (PSI) based on continuous wavelet transform is proposed in this paper. The tests on numerical simulation and Moiré interferometry are performed for the validation. In the temporal PSI, the interferograms are reconstructed upon the assumptions of the accurate estimation of the shifted phase steps. The estimations are usually based on the experimental configuration of the phase shifting mechanism. Due to the calibration error and environmental errors, the phase steps are not constants and vary with time and introduce error in the phase reconstruction. To solve this problem, the researchers proposed different phase step estimation algorithms which explore both temporal (interframe) and spatial redundancies (intra-frame) in the data to estimate the shifted phase. Each algorithm imposes different constraints on the structure of the shifted phases. The accuracy of the estimated phase steps varies under different condition and also changes among different interferometers. The proposed methods can serve as a benchmark method for comparing the accuracy of the different phase steps estimation methods statistically.
AB - A statistical phase shifting estimation for temporal phase shifting interferometry (PSI) based on continuous wavelet transform is proposed in this paper. The tests on numerical simulation and Moiré interferometry are performed for the validation. In the temporal PSI, the interferograms are reconstructed upon the assumptions of the accurate estimation of the shifted phase steps. The estimations are usually based on the experimental configuration of the phase shifting mechanism. Due to the calibration error and environmental errors, the phase steps are not constants and vary with time and introduce error in the phase reconstruction. To solve this problem, the researchers proposed different phase step estimation algorithms which explore both temporal (interframe) and spatial redundancies (intra-frame) in the data to estimate the shifted phase. Each algorithm imposes different constraints on the structure of the shifted phases. The accuracy of the estimated phase steps varies under different condition and also changes among different interferometers. The proposed methods can serve as a benchmark method for comparing the accuracy of the different phase steps estimation methods statistically.
KW - Continuous wavelet transform
KW - Phase shifting interferometry
KW - Statistical estimation
UR - https://www.scopus.com/pages/publications/77955178599
U2 - 10.1109/ITHERM.2010.5501282
DO - 10.1109/ITHERM.2010.5501282
M3 - Conference contribution
AN - SCOPUS:77955178599
SN - 9781424453429
T3 - 2010 12th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2010
BT - 2010 12th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2010
T2 - 2010 12th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2010
Y2 - 2 June 2010 through 5 June 2010
ER -