Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O

Q. Y. Ying; D. T. Shaw; H. S. Kwok

doi:10.1063/1.100477

Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O

Q. Y. Ying
, D. T. Shaw
, H. S. Kwok

Department of Electrical Engineering

SUNY Buffalo

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Abstract

Photoluminescence spectroscopy of the plasma plume during plasma-assisted laser deposition of YBa₂Cu₃O_7-x was performed. The spectrum in the range of 355-900 nm was measured at several spatial positions using an optical multichannel analyzer. It was found that both atomic and molecular components were present. Rich emission lines of O, O⁺, Y, Y⁺, Ba, Ba⁺, and Cu were observed, from which the plasma temperature could be estimated. Cu⁺ emission was conspicuously absent. The mechanism of the plasma process and its relevance to thin-film formation is discussed.

Original language	English
Pages (from-to)	1762-1764
Number of pages	3
Journal	Applied Physics Letters
Volume	53
Issue number	18
DOIs	https://doi.org/10.1063/1.100477
State	Published - 1988

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title = "Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O",

abstract = "Photoluminescence spectroscopy of the plasma plume during plasma-assisted laser deposition of YBa2Cu3O7-x was performed. The spectrum in the range of 355-900 nm was measured at several spatial positions using an optical multichannel analyzer. It was found that both atomic and molecular components were present. Rich emission lines of O, O+, Y, Y+, Ba, Ba+, and Cu were observed, from which the plasma temperature could be estimated. Cu+ emission was conspicuously absent. The mechanism of the plasma process and its relevance to thin-film formation is discussed.",

author = "Ying, \{Q. Y.\} and Shaw, \{D. T.\} and Kwok, \{H. S.\}",

year = "1988",

doi = "10.1063/1.100477",

language = "English",

volume = "53",

pages = "1762--1764",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "18",

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T1 - Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O

AU - Ying, Q. Y.

AU - Shaw, D. T.

AU - Kwok, H. S.

PY - 1988

Y1 - 1988

N2 - Photoluminescence spectroscopy of the plasma plume during plasma-assisted laser deposition of YBa2Cu3O7-x was performed. The spectrum in the range of 355-900 nm was measured at several spatial positions using an optical multichannel analyzer. It was found that both atomic and molecular components were present. Rich emission lines of O, O+, Y, Y+, Ba, Ba+, and Cu were observed, from which the plasma temperature could be estimated. Cu+ emission was conspicuously absent. The mechanism of the plasma process and its relevance to thin-film formation is discussed.

AB - Photoluminescence spectroscopy of the plasma plume during plasma-assisted laser deposition of YBa2Cu3O7-x was performed. The spectrum in the range of 355-900 nm was measured at several spatial positions using an optical multichannel analyzer. It was found that both atomic and molecular components were present. Rich emission lines of O, O+, Y, Y+, Ba, Ba+, and Cu were observed, from which the plasma temperature could be estimated. Cu+ emission was conspicuously absent. The mechanism of the plasma process and its relevance to thin-film formation is discussed.

UR - https://www.scopus.com/pages/publications/21544471881

U2 - 10.1063/1.100477

DO - 10.1063/1.100477

M3 - Article

AN - SCOPUS:21544471881

SN - 0003-6951

VL - 53

SP - 1762

EP - 1764

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

Spectroscopic study of plasma-assisted laser deposition of Y-Ba-Cu-O

Abstract

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