Soft X-ray image storage in poly(methylmethacrylate)

D. M. Shinozaki; P. C. Cheng

doi:10.1007/BF00355144

Soft X-ray image storage in poly(methylmethacrylate)

D. M. Shinozaki
, P. C. Cheng

Department of Electrical Engineering

Western University

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Images stored in resist for soft X-ray lithography or microradiography were found to show a background noise which limits the resolution. This is due to the statistically variable spatial distribution of the photons incident on the resist surface. An estimate of the fundamental noise-limited resolution has been made from the experimental measurement of photon flux incident on the surface and the accurate development rate curves. Monochromatic radiation from a synchrotron source was used.

Original language	English
Pages (from-to)	192-198
Number of pages	7
Journal	Journal of Materials Science
Volume	31
Issue number	1
DOIs	https://doi.org/10.1007/BF00355144
State	Published - 1996

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10.1007/BF00355144

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title = "Soft X-ray image storage in poly(methylmethacrylate)",

abstract = "Images stored in resist for soft X-ray lithography or microradiography were found to show a background noise which limits the resolution. This is due to the statistically variable spatial distribution of the photons incident on the resist surface. An estimate of the fundamental noise-limited resolution has been made from the experimental measurement of photon flux incident on the surface and the accurate development rate curves. Monochromatic radiation from a synchrotron source was used.",

author = "Shinozaki, \{D. M.\} and Cheng, \{P. C.\}",

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AU - Shinozaki, D. M.

AU - Cheng, P. C.

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AB - Images stored in resist for soft X-ray lithography or microradiography were found to show a background noise which limits the resolution. This is due to the statistically variable spatial distribution of the photons incident on the resist surface. An estimate of the fundamental noise-limited resolution has been made from the experimental measurement of photon flux incident on the surface and the accurate development rate curves. Monochromatic radiation from a synchrotron source was used.

UR - https://www.scopus.com/pages/publications/0029770383

U2 - 10.1007/BF00355144

DO - 10.1007/BF00355144

M3 - Article

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VL - 31

SP - 192

EP - 198

JO - Journal of Materials Science

JF - Journal of Materials Science

IS - 1

ER -

Soft X-ray image storage in poly(methylmethacrylate)

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