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Single and double- sided sensing with piezoresistive microcantilevers

  • Georgia Institute of Technology
  • Oak Ridge National Laboratory

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Chemical sensing using microcantilevers is usually performed by functionalization of a single surface of the cantilever (single sided surface stress). The benefits of functionalization of both cantilever surfaces are discussed and a comparison of single and double-sided surface stress sensitivity is presented. Initial test results show that the surface stress sensitivities for these measurement modes compare well with theoretical estimates.

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
EditorsJean-Louis Viovy, Patrick Tabeling, Stephanie Descroix, Laurent Malaquin
PublisherChemical and Biological Microsystems Society
Pages1704-1707
Number of pages4
ISBN (Electronic)9780979806407
StatePublished - 2007
Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 - Paris, France
Duration: Oct 7 2007Oct 11 2007

Publication series

NameProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Conference

Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
Country/TerritoryFrance
CityParis
Period10/7/0710/11/07

Keywords

  • Microcantilever
  • Piezoresistive
  • Sensor
  • Surface stress

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