Semiconductor superlattices studied by grazing x-ray scattering and diffraction

Z. H. Ming; Y. L. Soo; S. Huang; Y. H. Kao; K. Stair; G. Devane; C. Choi-Feng; T. Chang; L. P. Fu; G. D. Gilliland; J. Klem; M. Hafich

Semiconductor superlattices studied by grazing x-ray scattering and diffraction

Z. H. Ming
, Y. L. Soo
, S. Huang
, Y. H. Kao
, K. Stair
, G. Devane
, C. Choi-Feng
, T. Chang
, L. P. Fu
, G. D. Gilliland
, J. Klem
, M. Hafich

Physics

SUNY Buffalo

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Semiconductor superlattices have been studied by grazing incidence x-ray scattering and x-ray diffraction. For superlattices of 100-period InGaAs/GaAs, lateral structural ordering has been found to occur in the material. For one particular sample (M1400), periodic thickness modulations have been observed in the InGaAs layers. X-ray results also provide evidence for an improvement of interface quality by using interrupt-growth method for 55-period AlAs/GaAs superlattices grown by MBE.

Original language	English
Pages (from-to)	325-330
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	417
State	Published - 1996
Event	Proceedings of the 1995 MRS Fall Meeting - Boston, MA, USA Duration: Nov 27 1995 → Dec 1 1995

Cite this

@article{d5342c9653384a0f909cae455b6499f7,

title = "Semiconductor superlattices studied by grazing x-ray scattering and diffraction",

abstract = "Semiconductor superlattices have been studied by grazing incidence x-ray scattering and x-ray diffraction. For superlattices of 100-period InGaAs/GaAs, lateral structural ordering has been found to occur in the material. For one particular sample (M1400), periodic thickness modulations have been observed in the InGaAs layers. X-ray results also provide evidence for an improvement of interface quality by using interrupt-growth method for 55-period AlAs/GaAs superlattices grown by MBE.",

author = "Ming, \{Z. H.\} and Soo, \{Y. L.\} and S. Huang and Kao, \{Y. H.\} and K. Stair and G. Devane and C. Choi-Feng and T. Chang and Fu, \{L. P.\} and Gilliland, \{G. D.\} and J. Klem and M. Hafich",

year = "1996",

language = "English",

volume = "417",

pages = "325--330",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1995 MRS Fall Meeting ; Conference date: 27-11-1995 Through 01-12-1995",

}

TY - JOUR

T1 - Semiconductor superlattices studied by grazing x-ray scattering and diffraction

AU - Ming, Z. H.

AU - Soo, Y. L.

AU - Huang, S.

AU - Kao, Y. H.

AU - Stair, K.

AU - Devane, G.

AU - Choi-Feng, C.

AU - Chang, T.

AU - Fu, L. P.

AU - Gilliland, G. D.

AU - Klem, J.

AU - Hafich, M.

PY - 1996

Y1 - 1996

N2 - Semiconductor superlattices have been studied by grazing incidence x-ray scattering and x-ray diffraction. For superlattices of 100-period InGaAs/GaAs, lateral structural ordering has been found to occur in the material. For one particular sample (M1400), periodic thickness modulations have been observed in the InGaAs layers. X-ray results also provide evidence for an improvement of interface quality by using interrupt-growth method for 55-period AlAs/GaAs superlattices grown by MBE.

AB - Semiconductor superlattices have been studied by grazing incidence x-ray scattering and x-ray diffraction. For superlattices of 100-period InGaAs/GaAs, lateral structural ordering has been found to occur in the material. For one particular sample (M1400), periodic thickness modulations have been observed in the InGaAs layers. X-ray results also provide evidence for an improvement of interface quality by using interrupt-growth method for 55-period AlAs/GaAs superlattices grown by MBE.

UR - https://www.scopus.com/pages/publications/0029715152

M3 - Conference article

AN - SCOPUS:0029715152

SN - 0272-9172

VL - 417

SP - 325

EP - 330

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1995 MRS Fall Meeting

Y2 - 27 November 1995 through 1 December 1995

ER -

Semiconductor superlattices studied by grazing x-ray scattering and diffraction

Abstract

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