TY - GEN
T1 - Semiconductor nanomembranes for integrated and flexible photonics
AU - Zhou, Weidong
AU - Ma, Zhenqiang
AU - Yang, Weiquan
AU - Chuwongin, Santhad
AU - Shuai, Yi Chen
AU - Seo, Jung Hun
AU - Zhao, Deyin
AU - Yang, Hongjun
AU - Soref, Richard
PY - 2011
Y1 - 2011
N2 - Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We review here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and hybrid organic/inorganic flexible photonics.
AB - Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We review here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and hybrid organic/inorganic flexible photonics.
UR - https://www.scopus.com/pages/publications/80051754002
U2 - 10.1109/ICO-IP.2011.5953817
DO - 10.1109/ICO-IP.2011.5953817
M3 - Conference contribution
AN - SCOPUS:80051754002
SN - 9781612843155
T3 - 2011 ICO International Conference on Information Photonics, IP 2011
BT - 2011 ICO International Conference on Information Photonics, IP 2011
T2 - 2011 ICO International Conference on Information Photonics, IP 2011
Y2 - 18 May 2011 through 20 May 2011
ER -