Abstract
Self-assembly of silicon nanowire (SiNW) arrays is studied using SF 6/O2 plasma treatment. The self-assembly method can be applied to single- and poly-crystalline Si substrates. Plasma conditions can control the length and diameter of the SiNW arrays. Lower reflectance of the wire arrays over the wavelength range 200-1100 nm is obtained. The conducting transparent indium-tin-oxide (ITO) electrode can be fully coated on the self-assembled SiNW arrays by sputtering. The ITO-coated SiNW solar cells show the same low surface light reflectance and a higher carrier collection efficiency than SiNW solar cells without ITO coating. An efficiency enhancement of around 3 times for ITO coated SiNW solar cells is demonstrated via experiments.
| Original language | English |
|---|---|
| Article number | 035202 |
| Journal | Chinese Physics Letters |
| Volume | 28 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2011 |
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