rf plasma-generated superconducting Y₁Ba₂Cu ₃O_7-x films

Using an inductively coupled rf plasma operated at atmospheric pressure, superconducting thin films of Y₁Ba₂Cu₃O _7-x have been grown in situ on single-crystal yttria-stabilized zirconia [100] from an aerosol precursor. X-ray diffraction and rocking curve results indicate that the films are highly c-axis oriented normal to the substrate with a lattice constant of 11.67-11.68 Å. The full width at half maximum of these films ranges from 0.55°to 1.0°. The films have typical T_c's of 86 K and J_c's in excess of 10⁵ A/cm² at 77 K and zero field; magnetic measurements reveal an anisotropy of 3:1 at 69 K. The dependence of the processing parameters on the transport properties of the superconducting films is discussed.