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RF characterization of gigahertz flexible silicon thin-film transistor on plastic substrates under bending conditions

  • Guoxuan Qin
  • , Jung Hun Seo
  • , Yang Zhang
  • , Han Zhou
  • , Weidong Zhou
  • , Yuxin Wang
  • , Jianguo Ma
  • , Zhenqiang Ma
  • Tianjin University
  • University of Wisconsin-Madison
  • University of Texas at Arlington
  • Masterwork Machinery Company, Ltd.

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

This letter presents fabrication of a flexible 1.5-μm-channel-length silicon thin-film transistor (TFT) on a plastic substrate with a cutoff frequency fT of ∼ 3.7 GHz and a maximum oscillation frequency f\max of ∼12 GHz. Radio-frequency (RF) characterization is conducted for the flexible TFT under uniaxial mechanical bending conditions, indicating slight but notable monotonic performance enhancement with larger bending strains. Equivalent circuit model and theoretical analysis are employed to understand the underlying mechanism. Flexible gigahertz TFTs are shown to be naturally suitable for high-performance RF/microwave applications under mechanical bending (deformation) environment. This letter provides insight on designing and employing flexible gigahertz active devices.

Original languageEnglish
Article number6407731
Pages (from-to)262-264
Number of pages3
JournalIEEE Electron Device Letters
Volume34
Issue number2
DOIs
StatePublished - 2013

Keywords

  • Bending strain
  • flexible electronics
  • modeling
  • silicon nanomembrane (SiNM)
  • thin-film transistor (TFT)

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