Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes

Minkyu Cho; Jung Hun Seo; Munho Kim; Jaeseong Lee; Dong Liu; Weidong Zhou; Zongfu Yu; Zhenqiang Ma

doi:10.1116/1.4948531

Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes

Minkyu Cho
, Jung Hun Seo
, Munho Kim
, Jaeseong Lee
, Dong Liu
, Weidong Zhou
, Zongfu Yu
, Zhenqiang Ma

Department of Materials Design and Innovation

University of Wisconsin-Madison
Korea Advanced Institute of Science and Technology
University of Texas at Arlington

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

In this paper, the authors report resonant cavity (RC) metal-semiconductor-metal (MSM) germanium nanomembrane (Ge NM) photodetectors via transfer printing. The dislocation-free Ge NM layer was transferred onto an ultrathin Si NM/SiO₂ distributed Bragg reflector. As a result, a low dark current density of 1 × 10^-9 A/μm² and a quantum efficiency of 17.3% at 1.55 μm, which is twice larger than the quantum efficiency without a bottom mirror, were measured from the transferred RC MSM Ge photodetector. The enhancement of the quantum efficiency is verified by simulation.

Original language	English
Article number	040604
Journal	Journal of Vacuum Science and Technology B
Volume	34
Issue number	4
DOIs	https://doi.org/10.1116/1.4948531
State	Published - Jul 1 2016

Access to Document

10.1116/1.4948531

Cite this

@article{6f1a9a1232f14f319c8830399ec5e25b,

title = "Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes",

abstract = "In this paper, the authors report resonant cavity (RC) metal-semiconductor-metal (MSM) germanium nanomembrane (Ge NM) photodetectors via transfer printing. The dislocation-free Ge NM layer was transferred onto an ultrathin Si NM/SiO2 distributed Bragg reflector. As a result, a low dark current density of 1 × 10-9 A/μm2 and a quantum efficiency of 17.3\% at 1.55 μm, which is twice larger than the quantum efficiency without a bottom mirror, were measured from the transferred RC MSM Ge photodetector. The enhancement of the quantum efficiency is verified by simulation.",

author = "Minkyu Cho and Seo, \{Jung Hun\} and Munho Kim and Jaeseong Lee and Dong Liu and Weidong Zhou and Zongfu Yu and Zhenqiang Ma",

note = "Publisher Copyright: {\textcopyright} 2016 American Vacuum Society.",

year = "2016",

month = jul,

day = "1",

doi = "10.1116/1.4948531",

language = "English",

volume = "34",

journal = "Journal of Vacuum Science and Technology B",

issn = "2166-2746",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes

AU - Cho, Minkyu

AU - Seo, Jung Hun

AU - Kim, Munho

AU - Lee, Jaeseong

AU - Liu, Dong

AU - Zhou, Weidong

AU - Yu, Zongfu

AU - Ma, Zhenqiang

PY - 2016/7/1

Y1 - 2016/7/1

N2 - In this paper, the authors report resonant cavity (RC) metal-semiconductor-metal (MSM) germanium nanomembrane (Ge NM) photodetectors via transfer printing. The dislocation-free Ge NM layer was transferred onto an ultrathin Si NM/SiO2 distributed Bragg reflector. As a result, a low dark current density of 1 × 10-9 A/μm2 and a quantum efficiency of 17.3% at 1.55 μm, which is twice larger than the quantum efficiency without a bottom mirror, were measured from the transferred RC MSM Ge photodetector. The enhancement of the quantum efficiency is verified by simulation.

AB - In this paper, the authors report resonant cavity (RC) metal-semiconductor-metal (MSM) germanium nanomembrane (Ge NM) photodetectors via transfer printing. The dislocation-free Ge NM layer was transferred onto an ultrathin Si NM/SiO2 distributed Bragg reflector. As a result, a low dark current density of 1 × 10-9 A/μm2 and a quantum efficiency of 17.3% at 1.55 μm, which is twice larger than the quantum efficiency without a bottom mirror, were measured from the transferred RC MSM Ge photodetector. The enhancement of the quantum efficiency is verified by simulation.

UR - https://www.scopus.com/pages/publications/84968835217

U2 - 10.1116/1.4948531

DO - 10.1116/1.4948531

M3 - Article

AN - SCOPUS:84968835217

SN - 2166-2746

VL - 34

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 4

M1 - 040604

ER -

Resonant cavity germanium photodetector via stacked single-crystalline nanomembranes

Abstract

Access to Document

Other files and links

Fingerprint

Cite this