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Raman scattering studies of metalorganic chemical vapor deposition grown GaAs/AlAs superlattices

  • Xerox
  • Palo Alto Research Center

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

We have used Raman backscattering to characterize GaAs/AlAs superlattices grown by metalorganic chemical vapor deposition technique. Diffusion across the GaAs and AlAs interfaces can be observed by studying the optic and folded acoustic phonon scattering. Observation of light scattering from folded acoustic phonons in metalorganic chemical vapor deposition grown samples suggests the ability of the technique in monitoring the layer-to-layer uniformity of superlattices. Using a simple, analytic model we estimate the interfacial width to be 20 Å.

Original languageEnglish
Pages (from-to)1112-1114
Number of pages3
JournalJournal of Applied Physics
Volume62
Issue number3
DOIs
StatePublished - 1987

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