Abstract
An Fe film was grown on an Si(100) substrate by metalorganic chemical vapor deposition (MOCVD) using thermal decomposition of iron pentacarbonyl, Fe(CO)5. The X-ray diffraction and cross-sectional high resolution electron microscopy (HREM) show that the Fe deposited film is a single crystal Fe film on Si(100). Single crystal Fe/Si Schottky barrier diodes exhibit good rectification.
| Original language | English |
|---|---|
| Pages (from-to) | 237-239 |
| Number of pages | 3 |
| Journal | Applied Physics A: Solids and Surfaces |
| Volume | 50 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 1990 |
Keywords
- 68.55.+b
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