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Properties of Fe/Si heterostructure grown by MOCVD

  • Youdou Zheng
  • , Rong Zhang
  • , Yong Yan
  • , Duan Feng
  • , T. W. Kim
  • , B. D. McCombe
  • Nanjing University
  • SUNY Buffalo

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

An Fe film was grown on an Si(100) substrate by metalorganic chemical vapor deposition (MOCVD) using thermal decomposition of iron pentacarbonyl, Fe(CO)5. The X-ray diffraction and cross-sectional high resolution electron microscopy (HREM) show that the Fe deposited film is a single crystal Fe film on Si(100). Single crystal Fe/Si Schottky barrier diodes exhibit good rectification.

Original languageEnglish
Pages (from-to)237-239
Number of pages3
JournalApplied Physics A: Solids and Surfaces
Volume50
Issue number2
DOIs
StatePublished - Feb 1990

Keywords

  • 68.55.+b

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