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Processing effects on the morphological stability at epitaxial interfaces

  • Rensselaer Polytechnic Institute

Research output: Contribution to journalArticlepeer-review

Abstract

A phenomenological framework has been developed to account for interfacial instabilities during epitaxial growth. It is proposed that these instabilities are influenced by surface phenomena, through modification of surface free energy of the substrate by the first monolayers of the depositing element. Instabilities occuring in the CoSi2/Si system are considered as an example. Specifically, Gjostein's (1963) treatment of surface instabilities caused by an adsorbing gas is applied here, and instability criteria are derived in terms of the Herring construction (Herring, 1951).

Original languageEnglish
Pages (from-to)907-911
Number of pages5
JournalJournal of Electronic Materials
Volume23
Issue number9
DOIs
StatePublished - Sep 1994

Keywords

  • Epitaxy
  • faceting
  • morphological stability
  • Wulff plot

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