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Polymer-assisted deposition

  • Anthony K. Burrell
  • , Thomas M. McCleskey
  • , Quanxi Jia
  • Los Alamos National Laboratory
  • Argonne National Laboratory

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

4 Scopus citations

Abstract

In this chapter, polymer-assisted deposition (PAD) to grow metal-oxide films with desired structural and physical properties is described. In the PAD process, the polymer controls the viscosity and binds metal-ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of uniform metal-organic films. The latter feature makes it possible to grow a wide range of simple and complex metal-oxide films with desired structural and physical properties. Compared to other chemical solution deposition techniques, the development of PAD technology is still in the early stage. Many issues related to materials science and chemistry need to be investigated, and further optimization of processes is necessary for the high quality materials.

Original languageEnglish
Title of host publicationChemical Solution Deposition of Functional Oxide Thin Films
PublisherSpringer-Verlag Wien
Pages141-158
Number of pages18
Volume9783211993118
ISBN (Electronic)9783211993118
ISBN (Print)321199310X, 9783211993101
DOIs
StatePublished - Dec 1 2013

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