@inproceedings{1defddfd4453410da86bf6f91451a401,
title = "Plasma-enhanced MOCVD of superconducting oxides",
abstract = "The plasma-enhanced MOCVD is developed to prepare high-Tc oxide superconducting thin films. Plasmas generated by microwave and rf discharges decompose effectively the source materials (B-diketonate chelates) into their elements and oxides. YBaCuO thin films were deposited on the MgO substrate of 500-650°C at total pressure of 0.6-5 Torr with O2 contents less than 30\%. The as-grown films produced by two kinds of plasma enhancement were porous and consisted of crystalline grains, but showed the superconducting transition after heating procedure at around 800°C. It is shown that the inherent crystalline orientations of the as-grown films determine the crystal structure of the post-annealed films. The film of the metal atomic ratios of 0.91 for Ba/Y and 2.64 for Cu/Y showed the superconducting properties with Tc(zero) of 89 K and the critical current density (at 77 K) of 5×104 A/cm2. Spectroscopic analysis showed that the plasmas are composed of many excited species such as Y, Y+, Ba, Ba+, Cu, YO, BaO, CuO. Formation of the metal-oxides through the gas phase reaction is essential for the high-quality YBaCuO superconducting thin film preparation in the PE-MOCVD.",
author = "Kenji Ebihara and Tomoyuki Fujishima and Masanobu Shiga and Quanxi Jia",
year = "1994",
language = "English",
isbn = "1558992340",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "261--272",
editor = "Desu, \{Seshu B.\} and Beach, \{David B.\} and Wessels, \{Bruce W.\} and Suleyman Gokoglu",
booktitle = "Metal-Organic Chemical Vapor Deposition of Electronic Ceramics",
note = "Proceedings of the 1993 Fall Meeting of the Materials Research Society ; Conference date: 29-11-1993 Through 02-12-1993",
}