Piezoelectric self-sensing of adsorption-induced microcantilever bending

J. D. Adams; B. Rogers; L. Manning; Z. Hu; T. Thundat; H. Cavazos; S. C. Minne

doi:10.1016/j.sna.2005.03.058

Piezoelectric self-sensing of adsorption-induced microcantilever bending

J. D. Adams
, B. Rogers
, L. Manning
, Z. Hu
, T. Thundat
, H. Cavazos
, S. C. Minne

Department of Chemical and Biological Engineering

University of Nevada, Reno
Oak Ridge National Laboratory
Nanodevices Incorporated

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

Abstract

A self-sensing, self-actuating, piezoelectric microcantilever is used to detect adsorption-induced bending. Bending is measured by bringing the resonating cantilever into intermittent contact with a surface, the elevation of which is maintained by a piezotube in feedback. When the cantilever bends, its oscillatory amplitude changes and the piezotube is adjusted to compensate. Cantilever amplitude is detected using the voltage output of the piezoelectric film. Bending in this test was caused by mercury adsorption onto gold. A 50 ppb mercury concentration in nitrogen gas was detected.

Original language	English
Pages (from-to)	457-461
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	121
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2005.03.058
State	Published - Jun 30 2005

Keywords

Adsorption
Bending
Cantilever
Piezoelectric
Sensor

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10.1016/j.sna.2005.03.058

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title = "Piezoelectric self-sensing of adsorption-induced microcantilever bending",

abstract = "A self-sensing, self-actuating, piezoelectric microcantilever is used to detect adsorption-induced bending. Bending is measured by bringing the resonating cantilever into intermittent contact with a surface, the elevation of which is maintained by a piezotube in feedback. When the cantilever bends, its oscillatory amplitude changes and the piezotube is adjusted to compensate. Cantilever amplitude is detected using the voltage output of the piezoelectric film. Bending in this test was caused by mercury adsorption onto gold. A 50 ppb mercury concentration in nitrogen gas was detected.",

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AU - Adams, J. D.

AU - Rogers, B.

AU - Manning, L.

AU - Hu, Z.

AU - Thundat, T.

AU - Cavazos, H.

AU - Minne, S. C.

PY - 2005/6/30

Y1 - 2005/6/30

N2 - A self-sensing, self-actuating, piezoelectric microcantilever is used to detect adsorption-induced bending. Bending is measured by bringing the resonating cantilever into intermittent contact with a surface, the elevation of which is maintained by a piezotube in feedback. When the cantilever bends, its oscillatory amplitude changes and the piezotube is adjusted to compensate. Cantilever amplitude is detected using the voltage output of the piezoelectric film. Bending in this test was caused by mercury adsorption onto gold. A 50 ppb mercury concentration in nitrogen gas was detected.

AB - A self-sensing, self-actuating, piezoelectric microcantilever is used to detect adsorption-induced bending. Bending is measured by bringing the resonating cantilever into intermittent contact with a surface, the elevation of which is maintained by a piezotube in feedback. When the cantilever bends, its oscillatory amplitude changes and the piezotube is adjusted to compensate. Cantilever amplitude is detected using the voltage output of the piezoelectric film. Bending in this test was caused by mercury adsorption onto gold. A 50 ppb mercury concentration in nitrogen gas was detected.

KW - Adsorption

KW - Bending

KW - Cantilever

KW - Piezoelectric

KW - Sensor

UR - https://www.scopus.com/pages/publications/19744366250

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DO - 10.1016/j.sna.2005.03.058

M3 - Article

AN - SCOPUS:19744366250

SN - 0924-4247

VL - 121

SP - 457

EP - 461

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

ER -

Piezoelectric self-sensing of adsorption-induced microcantilever bending

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Keywords

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