TY - GEN
T1 - Piezoelectric response of novel multiferroic microcantilevers
AU - Prashanthi, K.
AU - Thundat, T.
AU - Palkar, V. R.
PY - 2011
Y1 - 2011
N2 - Recently developed magnetoelectric (M-E) multiferroic system, Dy modified BiFeO3 (Bi0.7Dy0.3FeO3 or BDFO) exhibits ferromagnetism and ferroelectricity at room temperature with significant M-E coupling. We have been successful in developing a CMOS compatible MEMS fabrication process using BDFO and fabricated BDFO microcantilevers directly on Si. The fabricated BDFO cantilevers are tested for the actuation using magnetic as well as electric fields. In this paper, the piezoelectric behavior of BDFO thin films and microcantilevers directly fabricated on Si are reported. These results suggest BDFO as a possible substitute for lead-free MEMS in the near future.
AB - Recently developed magnetoelectric (M-E) multiferroic system, Dy modified BiFeO3 (Bi0.7Dy0.3FeO3 or BDFO) exhibits ferromagnetism and ferroelectricity at room temperature with significant M-E coupling. We have been successful in developing a CMOS compatible MEMS fabrication process using BDFO and fabricated BDFO microcantilevers directly on Si. The fabricated BDFO cantilevers are tested for the actuation using magnetic as well as electric fields. In this paper, the piezoelectric behavior of BDFO thin films and microcantilevers directly fabricated on Si are reported. These results suggest BDFO as a possible substitute for lead-free MEMS in the near future.
KW - Microelectromechanical devices
KW - multiferroic thin films
KW - piezoresponse force microscopy
UR - https://www.scopus.com/pages/publications/80053342431
U2 - 10.1109/ISAF.2011.6014157
DO - 10.1109/ISAF.2011.6014157
M3 - Conference contribution
AN - SCOPUS:80053342431
SN - 9781457711626
T3 - 2011 International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/PFM 2011
BT - 2011 International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/PFM 2011
T2 - 2011 International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/PFM 2011
Y2 - 24 July 2011 through 27 July 2011
ER -