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Optimal Accelerated Test Regions for Time- Dependent Dielectric Breakdown Lifetime Parameters Estimation in FinFET Technology

  • Kexin Yang
  • , Rui Zhang
  • , Taizhi Liu
  • , Dae Hyun Kim
  • , Linda Milor
  • Georgia Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

This paper proposes a methodology to find optimal accelerated test regions for lifetime parameter estimation for not only the traditional reliability concern, frontend-of-line dielectric breakdown (FEOL TDDB), but also the newly emerging wearout mechanism, middle-of-line time dependent dielectric breakdown (MOL TDDB) in 14nm FinFET technology. The framework to find the optimal test regions is introduced; the error estimating methodology is discussed in detail. Three digital circuits are presented for evaluation and comparison. The optimal test regions depend on the circuit size as well as the types of standard cells in the circuits. To ensure accurate lifetime parameter estimation, both error from sampling and error from selectivity should be considered at the same time. As a general guideline, higher estimation accuracy will be achieved by testing gate TDDB lifetime parameters at higher voltages, while testing middle-of-line TDDB at higher temperatures.

Original languageEnglish
Title of host publicationProceedings - 33rd Conference on Design of Circuits and Integrated Systems, DCIS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728101712
DOIs
StatePublished - Apr 3 2019
Event33rd Conference on Design of Circuits and Integrated Systems, DCIS 2018 - Lyon, France
Duration: Nov 14 2018Nov 16 2018

Publication series

NameProceedings - 33rd Conference on Design of Circuits and Integrated Systems, DCIS 2018

Conference

Conference33rd Conference on Design of Circuits and Integrated Systems, DCIS 2018
Country/TerritoryFrance
CityLyon
Period11/14/1811/16/18

Keywords

  • digital circuit
  • FinFET
  • frontend-of-line dielectric breakdown
  • lifetime
  • middle-of-line breakdown
  • reliability
  • time-dependent dielectric breakdown
  • wearout

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