Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser

Junfeng Jiang; Tiegen Liu; Kun Liu; Lijuan Jiang; Xiao Liang; Yu Liu; Meng Wang; Cong Xu; Yimo Zhang; Xuejin Li

doi:10.1049/cp.2010.1165

Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser

Junfeng Jiang
, Tiegen Liu
, Kun Liu
, Lijuan Jiang
, Xiao Liang
, Yu Liu
, Meng Wang
, Cong Xu
, Yimo Zhang
, Xuejin Li

Department of Epidemiology and Environmental Health

Tianjin University
Shenzhen University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.

Original language	English
Title of host publication	9th International Conference on Optical Communications and Networks, ICOCN 2010
Pages	112-115
Number of pages	4
Edition	574 CP
DOIs	https://doi.org/10.1049/cp.2010.1165
State	Published - 2010
Event	9th International Conference on Optical Communications and Networks, ICOCN 2010 - Nanjing, China Duration: Oct 24 2010 → Oct 27 2010

Publication series

Name	IET Conference Publications
Number	574 CP
Volume	2010

Conference

Conference	9th International Conference on Optical Communications and Networks, ICOCN 2010
Country/Territory	China
City	Nanjing
Period	10/24/10 → 10/27/10

Keywords

Diaphragm
Laser ablation
Optical fiber Fabry- Perot
Pressure sensor
Sensors
Silicon

Access to Document

10.1049/cp.2010.1165

Cite this

Jiang, J., Liu, T., Liu, K., Jiang, L., Liang, X., Liu, Y., Wang, M., Xu, C., Zhang, Y., & Li, X. (2010). Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser. In 9th International Conference on Optical Communications and Networks, ICOCN 2010 (574 CP ed., pp. 112-115). (IET Conference Publications; Vol. 2010, No. 574 CP). https://doi.org/10.1049/cp.2010.1165

@inproceedings{157971cd47044bd2aec889b0ac49124f,

title = "Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser",

abstract = "Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.",

keywords = "Diaphragm, Laser ablation, Optical fiber Fabry- Perot, Pressure sensor, Sensors, Silicon",

author = "Junfeng Jiang and Tiegen Liu and Kun Liu and Lijuan Jiang and Xiao Liang and Yu Liu and Meng Wang and Cong Xu and Yimo Zhang and Xuejin Li",

year = "2010",

doi = "10.1049/cp.2010.1165",

language = "English",

isbn = "9781849193146",

series = "IET Conference Publications",

number = "574 CP",

pages = "112--115",

booktitle = "9th International Conference on Optical Communications and Networks, ICOCN 2010",

edition = "574 CP",

note = "9th International Conference on Optical Communications and Networks, ICOCN 2010 ; Conference date: 24-10-2010 Through 27-10-2010",

}

Jiang, J, Liu, T, Liu, K, Jiang, L, Liang, X, Liu, Y, Wang, M, Xu, C, Zhang, Y & Li, X 2010, Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser. in 9th International Conference on Optical Communications and Networks, ICOCN 2010. 574 CP edn, IET Conference Publications, no. 574 CP, vol. 2010, pp. 112-115, 9th International Conference on Optical Communications and Networks, ICOCN 2010, Nanjing, China, 10/24/10. https://doi.org/10.1049/cp.2010.1165

Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser. / Jiang, Junfeng; Liu, Tiegen; Liu, Kun et al.
9th International Conference on Optical Communications and Networks, ICOCN 2010. 574 CP. ed. 2010. p. 112-115 (IET Conference Publications; Vol. 2010, No. 574 CP).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser

AU - Jiang, Junfeng

AU - Liu, Tiegen

AU - Liu, Kun

AU - Jiang, Lijuan

AU - Liang, Xiao

AU - Liu, Yu

AU - Wang, Meng

AU - Xu, Cong

AU - Zhang, Yimo

AU - Li, Xuejin

PY - 2010

Y1 - 2010

N2 - Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.

AB - Through laser ablation process, a diaphragm with mesa structure is fabricated successfully in silicon wafer with Nd:YAG laser machining system. Then the silicon diaphragm is used to make optical fiber Fabry-Perot pressure sensor. The pressure sensing experiment showed the sensor had a good linear response with sensitivity 10.6 nm/kPa at the range 40-240 kPa.

KW - Diaphragm

KW - Laser ablation

KW - Optical fiber Fabry- Perot

KW - Pressure sensor

KW - Sensors

KW - Silicon

UR - https://www.scopus.com/pages/publications/79960571662

U2 - 10.1049/cp.2010.1165

DO - 10.1049/cp.2010.1165

M3 - Conference contribution

AN - SCOPUS:79960571662

SN - 9781849193146

T3 - IET Conference Publications

SP - 112

EP - 115

BT - 9th International Conference on Optical Communications and Networks, ICOCN 2010

T2 - 9th International Conference on Optical Communications and Networks, ICOCN 2010

Y2 - 24 October 2010 through 27 October 2010

ER -

Optical fiber Fabry-Perot pressure sensor machined by Nd:YAG laser

Abstract

Publication series

Conference

Keywords

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