Multitechnique surface spectroscopic studies of plasma modified polymers III. H₂O and O₂/H₂O plasma modified poly(methyl methacrylate)s

The surfaces of poly(methyl methacrylate) (PMMA) films modified by O₂H₂O and H₂O radio‐frequency glow discharge plasmas were studied using electron spectroscopy for chemical analysis (ESCA or XPS), low energy ion scattering (LEISS or ISS), Fourier transform IR spectroscopy (FTIR) with attenuated total reflectance (ATR) sampling, and critical surface energy from contact angle measurements. The extent and nature of modification with respect to promotion of a hydrophilic surface compared to the hydrophobic surface of the unmodified PMMA has been probed. Results show drastic decreases in C/O ratio at the near surface, which increases to that of the unmodified PMMA as deeper cross sections are analyzed. In addition peak fitting of ESCA data correlated with FTIR functional group information allows for the qualitative and quantitative analysis of the resulting bonding and structure of the modified layer. From these results combined with the polarity and surface energy differences obtained from contact angle measurements, the structural changes are discussed with respect to plasma reaction mechanisms and differences in the structure of the modified polymer films.