@article{9f75fe0aa3b544389f91f0e05f7a9547,
title = "Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane",
keywords = "Chemical Kinetics, Nucleation, Silane, Silicon CVD",
author = "Swihart, \{M. T.\} and S. Nijhawan and Mahajan, \{M. R.\} and Suh, \{S. M.\} and Girshick, \{S. L.\}",
year = "1998",
month = sep,
doi = "10.1016/S0021-8502(98)00123-2",
language = "English",
volume = "29",
pages = "S79--S80",
journal = "Journal of Aerosol Science",
issn = "0021-8502",
publisher = "Elsevier Ltd",
number = "SUPPL 1",
}