Microstructure of Ba0.5Sr0.5TiO3 thin films on (100) LaAlO3 with SrRuO3 as electrodes

Q. X. Jia; D. S. Zhou; S. R. Foltyn; X. D. Wu; A. T. Findikoglu; J. L. Smith

doi:10.1080/13642819708202314

Microstructure of Ba_0.5Sr_0.5TiO₃ thin films on (100) LaAlO₃ with SrRuO₃ as electrodes

Q. X. Jia
, D. S. Zhou
, S. R. Foltyn
, X. D. Wu
, A. T. Findikoglu
, J. L. Smith

Department of Materials Design and Innovation

Los Alamos National Laboratory Materials Science and Technology Division
Applied Materials Incorporated
Symyx Technologies

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Using pulsed-laser deposition, We grew quaternary Ba_0.5Sr_0.5TiO₃ thin films heteroepitaxially on (100) LaAlO₃ substrates with conductive SrRuO₃ as a bottom electrode. The microstructure of this multilayer of Ba_0.5Sr_0.5TiO₃/SrRuO₃/LaAlO₃, was characterized by X-ray diffraction and cross-sectional transmission electron microscopy. The heteroepitaxial growth relationship was found to be (h00)Ba_0.5Sr_0.5TiO₃‖(00l)SrRuO₃‖(h00)LaAlO₃ and (110)Ba_0.5Sr_0.5TiO₃‖⟨100⟩SrRuO₃‖⟨110⟩LaAlO₃. The high dielectric constant of the crystalline Ba_0.5Sr_0.5TiO₃ thin films and the low leakage current of the Ba_0.5Sr_0.5TiO₃ film sandwiched between a top Au and bottom SrRuO₃ electrodes are attributed to the structural perfection of the films and the clean interfaces between layers.

Original language	English
Pages (from-to)	261-269
Number of pages	9
Journal	Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Volume	75
Issue number	2
DOIs	https://doi.org/10.1080/13642819708202314
State	Published - Feb 1997

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title = "Microstructure of Ba0.5Sr0.5TiO3 thin films on (100) LaAlO3 with SrRuO3 as electrodes",

abstract = "Using pulsed-laser deposition, We grew quaternary Ba0.5Sr0.5TiO3 thin films heteroepitaxially on (100) LaAlO3 substrates with conductive SrRuO3 as a bottom electrode. The microstructure of this multilayer of Ba0.5Sr0.5TiO3/SrRuO3/LaAlO3, was characterized by X-ray diffraction and cross-sectional transmission electron microscopy. The heteroepitaxial growth relationship was found to be (h00)Ba0.5Sr0.5TiO3‖(00l)SrRuO3‖(h00)LaAlO3 and (110)Ba0.5Sr0.5TiO3‖⟨100⟩SrRuO3‖⟨110⟩LaAlO3. The high dielectric constant of the crystalline Ba0.5Sr0.5TiO3 thin films and the low leakage current of the Ba0.5Sr0.5TiO3 film sandwiched between a top Au and bottom SrRuO3 electrodes are attributed to the structural perfection of the films and the clean interfaces between layers.",

author = "Jia, \{Q. X.\} and Zhou, \{D. S.\} and Foltyn, \{S. R.\} and Wu, \{X. D.\} and Findikoglu, \{A. T.\} and Smith, \{J. L.\}",

year = "1997",

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doi = "10.1080/13642819708202314",

language = "English",

volume = "75",

pages = "261--269",

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T1 - Microstructure of Ba0.5Sr0.5TiO3 thin films on (100) LaAlO3 with SrRuO3 as electrodes

AU - Jia, Q. X.

AU - Zhou, D. S.

AU - Foltyn, S. R.

AU - Wu, X. D.

AU - Findikoglu, A. T.

AU - Smith, J. L.

PY - 1997/2

Y1 - 1997/2

N2 - Using pulsed-laser deposition, We grew quaternary Ba0.5Sr0.5TiO3 thin films heteroepitaxially on (100) LaAlO3 substrates with conductive SrRuO3 as a bottom electrode. The microstructure of this multilayer of Ba0.5Sr0.5TiO3/SrRuO3/LaAlO3, was characterized by X-ray diffraction and cross-sectional transmission electron microscopy. The heteroepitaxial growth relationship was found to be (h00)Ba0.5Sr0.5TiO3‖(00l)SrRuO3‖(h00)LaAlO3 and (110)Ba0.5Sr0.5TiO3‖⟨100⟩SrRuO3‖⟨110⟩LaAlO3. The high dielectric constant of the crystalline Ba0.5Sr0.5TiO3 thin films and the low leakage current of the Ba0.5Sr0.5TiO3 film sandwiched between a top Au and bottom SrRuO3 electrodes are attributed to the structural perfection of the films and the clean interfaces between layers.

AB - Using pulsed-laser deposition, We grew quaternary Ba0.5Sr0.5TiO3 thin films heteroepitaxially on (100) LaAlO3 substrates with conductive SrRuO3 as a bottom electrode. The microstructure of this multilayer of Ba0.5Sr0.5TiO3/SrRuO3/LaAlO3, was characterized by X-ray diffraction and cross-sectional transmission electron microscopy. The heteroepitaxial growth relationship was found to be (h00)Ba0.5Sr0.5TiO3‖(00l)SrRuO3‖(h00)LaAlO3 and (110)Ba0.5Sr0.5TiO3‖⟨100⟩SrRuO3‖⟨110⟩LaAlO3. The high dielectric constant of the crystalline Ba0.5Sr0.5TiO3 thin films and the low leakage current of the Ba0.5Sr0.5TiO3 film sandwiched between a top Au and bottom SrRuO3 electrodes are attributed to the structural perfection of the films and the clean interfaces between layers.

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DO - 10.1080/13642819708202314

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SN - 1364-2812

VL - 75

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JO - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

JF - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties

IS - 2

ER -

Microstructure of Ba_0.5Sr_0.5TiO₃ thin films on (100) LaAlO₃ with SrRuO₃ as electrodes

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