@inproceedings{44928a72b64e43ee858a9954edb6985a,
title = "Microfabrication of rounded channel and waveguide integrated microlens using timed development and thermal reflow process",
abstract = "Timed development and thermal reflow processes have been utilized for the fabrication of rounded microfluidic channel and microlens. The curvature or the sphericity can be predicted by microfluidic surface mechanics and the meniscus profile derived from the Young-Laplace equation. Microfluidic channels with rounded walls, microlenses, and waveguide integrated microlenses are successfully demonstrated as test vehicles.",
keywords = "Microlens, Rounded channel, Sphericity, Thermal reflow, Timed development",
author = "Jungkwun Kim and Kangsun Lee and Oh, \{Kwang W.\} and Yoon, \{Yong Kyu\}",
year = "2009",
language = "English",
isbn = "9780979806421",
series = "Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Chemical and Biological Microsystems Society",
pages = "1365--1367",
booktitle = "Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
note = "13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009 ; Conference date: 01-11-2009 Through 05-11-2009",
}