Abstract
An in situ X-ray technique was used to study the diffusion of oxygen in c-axis oriented ErBa2Cu3Ox films made by rf magnetron sputtering. The diffusion is mainly parallel to the c-axis of the film, and the coefficients for oxygen diffusion are estimated to be in the order of 10-14 and 10-12 cm2·s-1 at annealing temperatures of 500°C and 900°C, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | L772-L774 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 29 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 1990 |
Keywords
- C-axis orientation
- Oxygen diffusion
- Superconductor
- Thin film
- X-ray diffraction
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