Abstract
This chapter provides a brief overview of magnetic actuators and focuses on basic magnetic theory, the principles of magnetic actuation, the materials and fabrication of magnetic actuators, and their applications. The topics covered include scaling effects, the Lorentz force, magnetic induction, magnetic force and torque, magnetic field gradient, magnetization, and magnetic actuation mechanisms. This chapter also discusses about representative magnetic materials and fabrication methods utilizing hard and soft magnetic materials, electromagnets (coils), and magnetic particles. Applications of magnetic actuation include microvalves, micropumps, micromixers, micromirrors, microswitches, as well as manipulation of magnetic particles and magnetic cell separation. With advancements in magnetic actuators, magnetic actuation will become more broadly applicable, and it holds great potential for further implementation and integration into novel magnetic microsystems.
| Original language | English |
|---|---|
| Title of host publication | Comprehensive Microsystems |
| Publisher | Elsevier |
| Pages | 39-68 |
| Number of pages | 30 |
| Volume | 2 |
| ISBN (Print) | 9780444521903 |
| DOIs | |
| State | Published - Jan 1 2007 |
Keywords
- Actuators
- Magnetic actuation
- Magnetic MEMS
- Magnetic particles
- Sensors
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