Low cost multitarget holder for pulsed laser deposition system

Xu Wang; Arthur F. Pun; Yan Xin; Jim P. Zheng

doi:10.1063/1.1791891

Low cost multitarget holder for pulsed laser deposition system

Xu Wang
, Arthur F. Pun
, Yan Xin
, Jim P. Zheng

Department of Electrical Engineering

Florida State University
National High Magnetic Field Laboratory

Research output: Contribution to journal › Article › peer-review

Abstract

A low cost multi-target holder (MTH) designed for pulsed laser deposition (PLD) systems fit for vacuum chamber ports of all size was designed and fabricated using only one rotary-linear motion feedthrough. This system can be used with vacuum chamber ports of small size because of the elimination of a second feedthrough. It provides current PLD chambers without enough large ports the ability to grow multi-layer films, and can decrease the required PLD chamber size. Its design of separate low cost MTH head and stud modules can be utilized to further prevent cross contamination from different multi-layer film fabrications. The MTH described was successfully utilized to grow SrRuO ₃-SrTiO ₃-SrRuO ₃ tri-layer films on LaAlO ₃ substrate.

Original language	English
Pages (from-to)	3365-3367
Number of pages	3
Journal	Review of Scientific Instruments
Volume	75
Issue number	10 I
DOIs	https://doi.org/10.1063/1.1791891
State	Published - Oct 2004

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10.1063/1.1791891

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title = "Low cost multitarget holder for pulsed laser deposition system",

abstract = "A low cost multi-target holder (MTH) designed for pulsed laser deposition (PLD) systems fit for vacuum chamber ports of all size was designed and fabricated using only one rotary-linear motion feedthrough. This system can be used with vacuum chamber ports of small size because of the elimination of a second feedthrough. It provides current PLD chambers without enough large ports the ability to grow multi-layer films, and can decrease the required PLD chamber size. Its design of separate low cost MTH head and stud modules can be utilized to further prevent cross contamination from different multi-layer film fabrications. The MTH described was successfully utilized to grow SrRuO 3-SrTiO 3-SrRuO 3 tri-layer films on LaAlO 3 substrate.",

author = "Xu Wang and Pun, \{Arthur F.\} and Yan Xin and Zheng, \{Jim P.\}",

year = "2004",

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doi = "10.1063/1.1791891",

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AU - Xin, Yan

AU - Zheng, Jim P.

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N2 - A low cost multi-target holder (MTH) designed for pulsed laser deposition (PLD) systems fit for vacuum chamber ports of all size was designed and fabricated using only one rotary-linear motion feedthrough. This system can be used with vacuum chamber ports of small size because of the elimination of a second feedthrough. It provides current PLD chambers without enough large ports the ability to grow multi-layer films, and can decrease the required PLD chamber size. Its design of separate low cost MTH head and stud modules can be utilized to further prevent cross contamination from different multi-layer film fabrications. The MTH described was successfully utilized to grow SrRuO 3-SrTiO 3-SrRuO 3 tri-layer films on LaAlO 3 substrate.

AB - A low cost multi-target holder (MTH) designed for pulsed laser deposition (PLD) systems fit for vacuum chamber ports of all size was designed and fabricated using only one rotary-linear motion feedthrough. This system can be used with vacuum chamber ports of small size because of the elimination of a second feedthrough. It provides current PLD chambers without enough large ports the ability to grow multi-layer films, and can decrease the required PLD chamber size. Its design of separate low cost MTH head and stud modules can be utilized to further prevent cross contamination from different multi-layer film fabrications. The MTH described was successfully utilized to grow SrRuO 3-SrTiO 3-SrRuO 3 tri-layer films on LaAlO 3 substrate.

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JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 10 I

ER -

Low cost multitarget holder for pulsed laser deposition system

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