Abstract
Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications.
| Original language | English |
|---|---|
| Pages (from-to) | 77-79 |
| Number of pages | 3 |
| Journal | Physica Status Solidi - Rapid Research Letters |
| Volume | 6 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 2012 |
Keywords
- Epoxy
- Nanocomposites
- Piezoelectric properties
- Polymers
- ZnO
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