Laser x-ray microscopy

R. W. Eason; P. C. Cheng; R. Feder; A. G. Michette; R. J. Rosser; F. O’Neill; Y. Owadano; P. T. Rumsby; M. J. Shaw; I. C. E. Turcu

doi:10.1080/713821966

Laser x-ray microscopy

R. W. Eason
, P. C. Cheng
, R. Feder
, A. G. Michette
, R. J. Rosser
, F. O’Neill
, Y. Owadano
, P. T. Rumsby
, M. J. Shaw
, I. C. E. Turcu

Department of Electrical Engineering

University of Essex
IBM
King's College London
Stony Brook University
Rutherford Appleton Laboratory

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

Soft X-ray contact microscopy has been performed using a shortlived laser-produced plasma as the X-ray source. Single-shot exposures have been recorded in X-ray photoresists, for both dried and in vivo conditions using the high-power Nd: Glass and KrF excimer laser systems, available at the SERC Central Laser Facility. The short exposure times of 1 ns and 30 ns respectively allow latent images of the specimens to be recorded before the onset of radiation damage.

Original language	English
Pages (from-to)	501-516
Number of pages	16
Journal	Optica Acta
Volume	33
Issue number	4
DOIs	https://doi.org/10.1080/713821966
State	Published - Apr 1986

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10.1080/713821966

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@article{6b9a4793fcf340dea30357ddc4cc26db,

title = "Laser x-ray microscopy",

abstract = "Soft X-ray contact microscopy has been performed using a shortlived laser-produced plasma as the X-ray source. Single-shot exposures have been recorded in X-ray photoresists, for both dried and in vivo conditions using the high-power Nd: Glass and KrF excimer laser systems, available at the SERC Central Laser Facility. The short exposure times of 1 ns and 30 ns respectively allow latent images of the specimens to be recorded before the onset of radiation damage.",

author = "Eason, \{R. W.\} and Cheng, \{P. C.\} and R. Feder and Michette, \{A. G.\} and Rosser, \{R. J.\} and F. O{\textquoteright}Neill and Y. Owadano and Rumsby, \{P. T.\} and Shaw, \{M. J.\} and \{E. Turcu\}, \{I. C.\}",

year = "1986",

month = apr,

doi = "10.1080/713821966",

language = "English",

volume = "33",

pages = "501--516",

journal = "Optica Acta",

issn = "0030-3909",

publisher = "Taylor and Francis Ltd.",

number = "4",

}

TY - JOUR

T1 - Laser x-ray microscopy

AU - Eason, R. W.

AU - Cheng, P. C.

AU - Feder, R.

AU - Michette, A. G.

AU - Rosser, R. J.

AU - O’Neill, F.

AU - Owadano, Y.

AU - Rumsby, P. T.

AU - Shaw, M. J.

AU - E. Turcu, I. C.

PY - 1986/4

Y1 - 1986/4

N2 - Soft X-ray contact microscopy has been performed using a shortlived laser-produced plasma as the X-ray source. Single-shot exposures have been recorded in X-ray photoresists, for both dried and in vivo conditions using the high-power Nd: Glass and KrF excimer laser systems, available at the SERC Central Laser Facility. The short exposure times of 1 ns and 30 ns respectively allow latent images of the specimens to be recorded before the onset of radiation damage.

AB - Soft X-ray contact microscopy has been performed using a shortlived laser-produced plasma as the X-ray source. Single-shot exposures have been recorded in X-ray photoresists, for both dried and in vivo conditions using the high-power Nd: Glass and KrF excimer laser systems, available at the SERC Central Laser Facility. The short exposure times of 1 ns and 30 ns respectively allow latent images of the specimens to be recorded before the onset of radiation damage.

UR - https://www.scopus.com/pages/publications/0022047170

U2 - 10.1080/713821966

DO - 10.1080/713821966

M3 - Article

AN - SCOPUS:0022047170

SN - 0030-3909

VL - 33

SP - 501

EP - 516

JO - Optica Acta

JF - Optica Acta

IS - 4

ER -

Laser x-ray microscopy

Abstract

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