Laser evaporation deposition of superconducting and semiconducting thin films

H. S. Kwok; P. Mattocks; D. T. Shaw; L. Shi; X. W. Wang; S. Witanachchi; Q. Y. Ying; J. P. Zheng; P. Bush

doi:10.1117/12.943992

Laser evaporation deposition of superconducting and semiconducting thin films

H. S. Kwok
, P. Mattocks
, D. T. Shaw
, L. Shi
, X. W. Wang
, S. Witanachchi
, Q. Y. Ying
, J. P. Zheng
, P. Bush

Department of Electrical Engineering

SUNY Buffalo

Research output: Contribution to journal › Article › peer-review

Abstract

We describe here the deposition of superconducting and semiconducting thin films by the laser evaporation technique. The, characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed. Results of laser interaction experiments will also be described.

Original language	English
Pages (from-to)	153-158
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	879
DOIs	https://doi.org/10.1117/12.943992
State	Published - May 18 1988

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10.1117/12.943992

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title = "Laser evaporation deposition of superconducting and semiconducting thin films",

abstract = "We describe here the deposition of superconducting and semiconducting thin films by the laser evaporation technique. The, characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed. Results of laser interaction experiments will also be described.",

author = "Kwok, \{H. S.\} and P. Mattocks and Shaw, \{D. T.\} and L. Shi and Wang, \{X. W.\} and S. Witanachchi and Ying, \{Q. Y.\} and Zheng, \{J. P.\} and P. Bush",

year = "1988",

month = may,

day = "18",

doi = "10.1117/12.943992",

language = "English",

volume = "879",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Laser evaporation deposition of superconducting and semiconducting thin films

AU - Kwok, H. S.

AU - Mattocks, P.

AU - Shaw, D. T.

AU - Shi, L.

AU - Wang, X. W.

AU - Witanachchi, S.

AU - Ying, Q. Y.

AU - Zheng, J. P.

AU - Bush, P.

PY - 1988/5/18

Y1 - 1988/5/18

N2 - We describe here the deposition of superconducting and semiconducting thin films by the laser evaporation technique. The, characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed. Results of laser interaction experiments will also be described.

AB - We describe here the deposition of superconducting and semiconducting thin films by the laser evaporation technique. The, characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed. Results of laser interaction experiments will also be described.

UR - https://www.scopus.com/pages/publications/84958497825

U2 - 10.1117/12.943992

DO - 10.1117/12.943992

M3 - Article

AN - SCOPUS:84958497825

SN - 0277-786X

VL - 879

SP - 153

EP - 158

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Laser evaporation deposition of superconducting and semiconducting thin films

Abstract

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