Laser evaporation deposition of superconducting and dielectric thin films

H. S. Kwok; P. Mattocks; L. Shi; X. W. Wang; S. Witanachchi; Q. Y. Ying; J. P. Zheng; D. T. Shaw

doi:10.1063/1.99727

Laser evaporation deposition of superconducting and dielectric thin films

H. S. Kwok
, P. Mattocks
, L. Shi
, X. W. Wang
, S. Witanachchi
, Q. Y. Ying
, J. P. Zheng
, D. T. Shaw

Department of Electrical Engineering

SUNY Buffalo

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Abstract

We describe here the deposition of superconducting and dielectric thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed.

Original language	English
Pages (from-to)	1825-1827
Number of pages	3
Journal	Applied Physics Letters
Volume	52
Issue number	21
DOIs	https://doi.org/10.1063/1.99727
State	Published - 1988

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10.1063/1.99727

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@article{b8267a401732462f8e06ab2beb8d73f5,

title = "Laser evaporation deposition of superconducting and dielectric thin films",

abstract = "We describe here the deposition of superconducting and dielectric thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed.",

author = "Kwok, \{H. S.\} and P. Mattocks and L. Shi and Wang, \{X. W.\} and S. Witanachchi and Ying, \{Q. Y.\} and Zheng, \{J. P.\} and Shaw, \{D. T.\}",

year = "1988",

doi = "10.1063/1.99727",

language = "English",

volume = "52",

pages = "1825--1827",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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T1 - Laser evaporation deposition of superconducting and dielectric thin films

AU - Kwok, H. S.

AU - Mattocks, P.

AU - Shi, L.

AU - Wang, X. W.

AU - Witanachchi, S.

AU - Ying, Q. Y.

AU - Zheng, J. P.

AU - Shaw, D. T.

PY - 1988

Y1 - 1988

N2 - We describe here the deposition of superconducting and dielectric thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed.

AB - We describe here the deposition of superconducting and dielectric thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed.

UR - https://www.scopus.com/pages/publications/0005638211

U2 - 10.1063/1.99727

DO - 10.1063/1.99727

M3 - Article

AN - SCOPUS:0005638211

SN - 0003-6951

VL - 52

SP - 1825

EP - 1827

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 21

ER -

Laser evaporation deposition of superconducting and dielectric thin films

Abstract

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