Intermediate Voltage Microscopy

Examining the advantages and limitations of electron microscopy at inter-mediate voltages (greater than ≈100 kV but less than 500 kV), this article emphasizes aspects of microscopy that cannot be performed using ≈100 kV instruments as well as applications that previously required instruments operating at greater than 500 kV. Based on early results, intermediate voltage microscopy appears to be achieving theoretical predictions. In the area of analytical microscopy, however, further research is necessary to explore its full potential. Nevertheless, these new classes of microscopes have enabled high resolution imaging and microanalysis with the same instrument.