Instant curvature measurement for microcantilever sensors

A method to measure cantilever curvature for microcantilever sensors was described. The multiple-point deflection technique use eight light-emitting diodes (LED), which are focused on various positions of a gold-coated silicon cantilever through optical fibers. A position sensitive detector is used to measure the deflection at each point on the cantilever surface. When combined with the resonance frequency measurement, the method can be used for understanding of stress evolution during molecular adsorption.