Abstract
We present our results to improve ion beam assisted deposition (IBAD) of magnesia (MgO) templates for subsequent YBa2Cu3O7-8 (YBCO) deposition. The substrate surface roughness has a significant effect on the initial nucleation texture of IBAD MgO films. We have found that reduction in our substrate surface roughness to ∼ 3.5 nm has resulted in better in-plane texture for IBAD MgO films than those deposited on rougher metal substrates. We have further improved the IBAD MgO deposition parameters by using an in situ reflected high-energy electron diffraction (RHEED) analysis tool that allows for monitoring of IBAD MgO growth. We have found a direct correlation between the RHEED generated intensity versus time curve and in-plane texture. Utilizing X-ray diffraction analysis, we have been able to determine the optimum deposition parameters to routinely grow films in batch mode that have a phi scan Δφ from 6-7°. Coupling the improvements in substrate preparation with optimization of IBAD MgO deposition has allowed for both batch and continuous deposition (termed c-IBAD MgO) on metallic substrates that result in superior superconducting properties. We have demonstrated that deposited meter lengths have had phi scan FWHM values from 8-9° with ±10% uniformity. Additionally, we have been able to widen the processing zone in our system and coat two, one-meter lengths simultaneously while preserving good texture quality (Δφave ∼ 8°) and uniformity (60-80% of tape length within ±5% of Δφave) for both tapes.
| Original language | English |
|---|---|
| Pages (from-to) | 2651-2654 |
| Number of pages | 4 |
| Journal | IEEE Transactions on Applied Superconductivity |
| Volume | 13 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jun 2003 |
Keywords
- Coated conductor
- High-temperature superconductor
- Ion-beam assisted deposition
- Magnesium oxide
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