Image fusion combining SEM and ToF-SIMS images

Image fusion allows for the combination of an image containing chemical information but low spatial resolution with a highspatial resolution image having little to no chemical information. The resulting hybrid image retains all the information from the chemically relevant original image, with improved spatial resolution allowing for visual inspection of the spatial correlations. In this research, images were obtained fromtwo sample test grids: one of a copper electronmicroscope grid with a letter 'A' in the center (referred to below as the 'A-grid'), and the other a Tantalum and Silicon test grid from Cameca that had an inscribed letter 'C' (referred to below as the 'Cameca grid'). These were obtained using scanning electron microscopy (SEM) and time-of-flight secondary ion mass spectrometry (ToF-SIMS). Image fusion was implemented with the Munechika algorithm. The edge resolution of the resulting hybrid image was calculated compared with the edge resolution obtained for both the individual ToF-SIMS and SEM images. The challenges of combining complimentary datasets from different instrumental analytical methods are discussed as well as the advantages of having a hybrid image. The distance across the edge for hybrid images of the A-Grid and the Cameca grid were determined to be 21 μm and 8μm, respectively. When these values were compared to the original ToF-SIMS, SEM and optical microscopy measurements, the fused image had a spatial resolution nearly equal to that obtained in the SEM image for both samples.