@inproceedings{48f508fd8aef4f18bbb5b324e081c2cf,
title = "High-reflectivity DUV mirrors prepared by direct sputtering",
abstract = "We report here high-reflectivity multilayer DBR mirrors in 200-240 nm spectral region. YSZ (yttria-stabilized zirconia), HfO2 and SiO2 films were all prepared by direct RF magnetron sputtering. The film annealing conditions were systematically varied to obtain layers with minimal optical absorption. Combining these results, high reflectivity YSZ/SiO2 and HfO2/SiO2 DBRs were designed and realized with reflectance greater than 99.9\%.",
author = "Hongjun Yang and Deyin Zhao and Liu, \{Shih Chia\} and Yonghao Liu and Seo, \{Jung Hun\} and Matt Hodek and Zhenqiang Ma and Albrecht, \{John D.\} and Baxter Moody and Weidong Zhou",
note = "Publisher Copyright: {\textcopyright} 2016 OSA.; 2016 Conference on Lasers and Electro-Optics, CLEO 2016 ; Conference date: 05-06-2016 Through 10-06-2016",
year = "2016",
month = dec,
day = "16",
doi = "10.1364/cleo\_si.2016.stu3r.3",
language = "English",
series = "2016 Conference on Lasers and Electro-Optics, CLEO 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 Conference on Lasers and Electro-Optics, CLEO 2016",
address = "United States",
}