Abstract
Epitaxial γ-Al2O3 thin films were grown on diverse substrates using pulsed laser deposition. The high quality of epitaxial growth and cubic structure of γ-Al2O3 films was confirmed by X-ray diffraction. SrTiO3 and MgO single crystal substrates were used to optimize the growth conditions for epitaxial γ-Al2O3 film. Under the optimized conditions, epitaxial γ-Al2O3 thin films were grown on flexible, single-crystal-like, metallic templates. These included untextured Hastelloy substrates with a biaxially textured MgO layer deposited using ion-beam-assisted-deposition and biaxially textured Ni-W metallic tapes with epitaxially grown and a biaxially textured, MgO buffer layer. These biaxially textured, γ-Al2O3 films on flexible, single-crystal-like substrates are promising for subsequent epitaxial growth of various complex oxide films used for electrical, magnetic and electronic device applications.
| Original language | English |
|---|---|
| Pages (from-to) | 5710-5714 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 517 |
| Issue number | 19 |
| DOIs | |
| State | Published - Aug 3 2009 |
Keywords
- γ-AlO
- Epitaxial oxide
- Pulsed laser deposition
- X-ray diffraction
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