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Growth of epitaxial γ-Al2O3 films on rigid single-crystal ceramic substrates and flexible, single-crystal-like metallic substrates by pulsed laser deposition

  • Oak Ridge National Laboratory
  • University of Tennessee

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Epitaxial γ-Al2O3 thin films were grown on diverse substrates using pulsed laser deposition. The high quality of epitaxial growth and cubic structure of γ-Al2O3 films was confirmed by X-ray diffraction. SrTiO3 and MgO single crystal substrates were used to optimize the growth conditions for epitaxial γ-Al2O3 film. Under the optimized conditions, epitaxial γ-Al2O3 thin films were grown on flexible, single-crystal-like, metallic templates. These included untextured Hastelloy substrates with a biaxially textured MgO layer deposited using ion-beam-assisted-deposition and biaxially textured Ni-W metallic tapes with epitaxially grown and a biaxially textured, MgO buffer layer. These biaxially textured, γ-Al2O3 films on flexible, single-crystal-like substrates are promising for subsequent epitaxial growth of various complex oxide films used for electrical, magnetic and electronic device applications.

Original languageEnglish
Pages (from-to)5710-5714
Number of pages5
JournalThin Solid Films
Volume517
Issue number19
DOIs
StatePublished - Aug 3 2009

Keywords

  • γ-AlO
  • Epitaxial oxide
  • Pulsed laser deposition
  • X-ray diffraction

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