Generalized interfaces

D. K. Ferry; R. A. Akis; J. P. Bird; M. Elhassan; I. Knezevic; C. Prasad; A. Shailos

doi:10.1116/1.1588642

Generalized interfaces

D. K. Ferry
, R. A. Akis
, J. P. Bird
, M. Elhassan
, I. Knezevic
, C. Prasad
, A. Shailos

Department of Electrical Engineering

Arizona State University

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Original language	English
Pages (from-to)	1891-1895
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1588642
State	Published - 2003

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title = "Generalized interfaces",

author = "Ferry, \{D. K.\} and Akis, \{R. A.\} and Bird, \{J. P.\} and M. Elhassan and I. Knezevic and C. Prasad and A. Shailos",

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AU - Ferry, D. K.

AU - Akis, R. A.

AU - Bird, J. P.

AU - Elhassan, M.

AU - Knezevic, I.

AU - Prasad, C.

AU - Shailos, A.

PY - 2003

Y1 - 2003

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SN - 1071-1023

VL - 21

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EP - 1895

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 4

ER -

Generalized interfaces

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