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Flexible Si BiCMOS on plastic substrates

  • University of Wisconsin-Madison
  • University of Texas at Arlington

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, we have demonstrated flexible BiCMOS devices on transferable single crystalline Si nanomembrane (Si NM), including n-channel and p-channel metal-oxide semiconductor field-effect transistors (NMOS & PMOS FETs) and NPN bipolar transistors (BJTs). All types of devices that were successfully integrated into Si NM demonstrated excellent DC and radio-frequency (RF) characteristics and performed a stable transconductance and a current gain under the bending condition. Overall, Si NM based flexible BiCMOS devices offer great promises for high-performance and multi-functional future flexible applications. Moreover, a flexible BiCMOS process we proposed has a good compatibility with commercial microfabrication technology and thus it is easy to adapt to industrial usage.

Original languageEnglish
Title of host publicationSiRF 2017 - 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages79-81
Number of pages3
ISBN (Electronic)9781509052363
DOIs
StatePublished - Mar 8 2017
Event17th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2017 - Phoenix, United States
Duration: Jan 15 2017Jan 18 2017

Publication series

NameSiRF 2017 - 2017 IEEE 17th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

Conference

Conference17th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2017
Country/TerritoryUnited States
CityPhoenix
Period01/15/1701/18/17

Keywords

  • BiCMOS devices
  • BJTs
  • Flexible electronics
  • TFTs

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