TY - GEN
T1 - First Demonstration of Single-Mode Polymer Optical Waveguides with Circular Cores for Fiber-to-Waveguide Coupling in 3D Glass Photonic Interposers
AU - Zhang, Rui
AU - Liu, Fuhan
AU - Sundaram, Venky
AU - Tummala, Rao
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/8/1
Y1 - 2017/8/1
N2 - A simple and low-cost fabrication method for single-mode polymer optical waveguides with circular cores was demonstrated for fiber-to-waveguide coupling. The waveguide structure consists of trenches with semicircular cross sections, fabricated with dry film benzocyclobutene (BCB) as the bottom cladding layer, circular cores embedded inside the trenches, and another layer of dry film BCB as the top cladding layer. Simple photolithography is used to pattern both trenches in the bottom cladding layer and cores, and only one mask is used for both lithography steps. The advantages of single-mode circular waveguides on ultra-thin 3D glass interposers are discussed by comparing optical properties of those with conventional polymer waveguides with trapezoidal cross sections. To the best of the author's knowledge, this is the first demonstration of single-mode polymer waveguides with circular cross sections. Fabrication of circular-core waveguides are discussed and geometry characterization and analysis are performed.
AB - A simple and low-cost fabrication method for single-mode polymer optical waveguides with circular cores was demonstrated for fiber-to-waveguide coupling. The waveguide structure consists of trenches with semicircular cross sections, fabricated with dry film benzocyclobutene (BCB) as the bottom cladding layer, circular cores embedded inside the trenches, and another layer of dry film BCB as the top cladding layer. Simple photolithography is used to pattern both trenches in the bottom cladding layer and cores, and only one mask is used for both lithography steps. The advantages of single-mode circular waveguides on ultra-thin 3D glass interposers are discussed by comparing optical properties of those with conventional polymer waveguides with trapezoidal cross sections. To the best of the author's knowledge, this is the first demonstration of single-mode polymer waveguides with circular cross sections. Fabrication of circular-core waveguides are discussed and geometry characterization and analysis are performed.
KW - 3D glass interposer
KW - BCB
KW - Circular core waveguide
KW - Polymer optical waveguide
UR - https://www.scopus.com/pages/publications/85028049197
U2 - 10.1109/ECTC.2017.306
DO - 10.1109/ECTC.2017.306
M3 - Conference contribution
AN - SCOPUS:85028049197
T3 - Proceedings - Electronic Components and Technology Conference
SP - 1606
EP - 1611
BT - Proceedings - IEEE 67th Electronic Components and Technology Conference, ECTC 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 67th IEEE Electronic Components and Technology Conference, ECTC 2017
Y2 - 30 May 2017 through 2 June 2017
ER -