Feasibility of a MEMS sensor for gas detection in HV oil-insulated transformer

This paper addresses protection of oil-insulated transformers, using a microelectromechanical systems (MEMS) sensor system to augment or replace existing protection techniques. Traditional technologies used for protection and analysis involve pressure and temperature sensing, gas chromatography, and/or a Buchholz relay. The proposed MEMS device is immersed within the insulating fluid, e.g., oil, and primarily consists of multiple microscale turbines centrally shafted to a MEMS generator. The device utilizes relative differences in the velocity, pressure, and flow rate of fluid caused by electric faults. A differential electrical output is produced, which can be coupled to a remote recorder.