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Facile fabrication of all-SWNT field-effect transistors

  • Shinya Aikawa
  • , Rong Xiang
  • , Erik Einarsson
  • , Shohei Chiashi
  • , Junichiro Shiomi
  • , Eiichi Nishikawa
  • , Shigeo Maruyama
  • The University of Tokyo
  • Tokyo University of Science
  • Sun Yat-Sen University

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

Field-effect transistors (FETs) have been fabricated using as-grown single-walled carbon nanotubes (SWNTs) for the channel as well as both source and drain electrodes. The underlying Si substrate was employed as the back-gate electrode. Fabrication consisted of patterned catalyst deposition by surface modification followed by dip-coating and synthesis of SWNTs by alcohol chemical vapor deposition (CVD). The electrodes and channel were grown simultaneously in one CVD process. The resulting FETs exhibited excellent performance, with an ION/IOFF ratio of 106 and a maximum ON-state current (ION) exceeding 13 μA. The large ION is attributed to SWNT bundles connecting the SWNT channel with the SWNT electrodes. Bundling creates a large contact area, which results in a small contact resistance despite the presence of Schottky barriers at metallic-semiconducting interfaces. The approach described here demonstrates a significant step toward the realization of metal-free electronics.

Original languageEnglish
Pages (from-to)580-588
Number of pages9
JournalNano Research
Volume4
Issue number6
DOIs
StatePublished - Jun 2011

Keywords

  • field-effect transistor
  • interfacial dipole
  • patterned synthesis
  • Schottky barrier
  • self-assembled monolayer
  • Single-walled carbon nanotube

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