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Estimation of surface diffusion length from AFM images of faceted GaAs(1|1|1|) homoepitaxial films

  • Rensselaer Polytechnic Institute

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

GaAs films growth on exact (̄1̄1̄1) substrates in the √19×√19 reconstruction regime always show facets. We have studied the surfaces of these films with an atomic force microscope. The facets are composed of vicinal surfaces which are tilted by small angles (≈2°) from the exact (̄1̄1̄1) plane. From the geometry of the facet, average displacement of adatoms is calculated. The results indicate that the diffusion length under the growth condition is more than 0. 2 μm.

Original languageEnglish
Title of host publicationEvolution of Surface and Thin Film Microstructure
EditorsHarry A. Atwater, Eric Chason, Marcia H. Grabow, Max G. Lagally
PublisherPubl by Materials Research Society
Pages143-146
Number of pages4
ISBN (Print)1558991751
StatePublished - 1993
EventProceedings of the 1992 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 30 1992 → Dec 4 1992

Publication series

NameMaterials Research Society Symposium Proceedings
Volume280
ISSN (Print)0272-9172

Conference

ConferenceProceedings of the 1992 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/30/92 → 12/4/92

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