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Equilibrium chemical vapor deposition growth of bernal-stacked bilayer graphene

  • Pei Zhao
  • , Sungjin Kim
  • , Xiao Chen
  • , Erik Einarsson
  • , Miao Wang
  • , Yenan Song
  • , Hongtao Wang
  • , Shohei Chiashi
  • , Rong Xiang
  • , Shigeo Maruyama
  • Zhejiang University
  • The University of Tokyo

Research output: Contribution to journalArticlepeer-review

73 Scopus citations

Abstract

Using ethanol as the carbon source, self-limiting growth of AB-stacked bilayer graphene (BLG) has been achieved on Cu via an equilibrium chemical vapor deposition (CVD) process. We found that during this alcohol catalytic CVD (ACCVD) a source-gas pressure range exists to break the self-limitation of monolayer graphene on Cu, and at a certain equilibrium state it prefers to form uniform BLG with a high surface coverage of ∼94% and AB-stacking ratio of nearly 100%. More importantly, once the BLG is completed, this growth shows a self-limiting manner, and an extended ethanol flow time does not result in additional layers. We investigate the mechanism of this equilibrium BLG growth using isotopically labeled 13C-ethanol and selective surface aryl functionalization, and results reveal that during the equilibrium ACCVD process a continuous substitution of graphene flakes occurs to the as-formed graphene and the BLG growth follows a layer-by-layer epitaxy mechanism. These phenomena are significantly in contrast to those observed for previously reported BLG growth using methane as precursor. (Figure Presented).

Original languageEnglish
Pages (from-to)11631-11638
Number of pages8
JournalACS Nano
Volume8
Issue number11
DOIs
StatePublished - Nov 25 2014

Keywords

  • Bilayer graphene
  • Chemical vapor deposition
  • Equilibrium
  • Isotope labeling
  • Layer-by-layer epitaxy

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